2/6/2012	9:13:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/6/2012	9:13:19 AM	Recipe started at 9:13 AM
2/6/2012	9:13:19 AM	Helium valve closed
2/6/2012	9:13:19 AM	H2 valve closed
2/6/2012	9:13:19 AM	BCl3 valve closed
2/6/2012	9:13:19 AM	PH3 valve closed
2/6/2012	9:13:19 AM	SiCl4 pre valve closed
2/6/2012	9:13:19 AM	SiCl4 post valve closed
2/6/2012	9:13:19 AM	Main Vac valve closed
2/6/2012	9:13:19 AM	Bypass valve closed
2/6/2012	9:13:19 AM	Bubbler valve closed
2/6/2012	9:13:19 AM	Helium MFC set to  0.000000
2/6/2012	9:13:19 AM	H2 MFC set to  0.000000
2/6/2012	9:13:19 AM	BCl3 MFC set to  0.000000
2/6/2012	9:13:19 AM	PH3 MFC set to  0.000000
2/6/2012	9:13:19 AM	SiCl4 MFC set to  0.000000
2/6/2012	9:13:19 AM	Bypass solenoid MFC set to  0.000000
2/6/2012	9:13:19 AM	Tube furnace set to 0
2/6/2012	9:13:22 AM	H2 valve closed
2/6/2012	9:13:22 AM	BCl3 valve closed
2/6/2012	9:13:22 AM	PH3 valve closed
2/6/2012	9:13:22 AM	SiCl4 pre valve closed
2/6/2012	9:13:22 AM	SiCl4 post valve closed
2/6/2012	9:13:23 AM	Main Vac valve closed
2/6/2012	9:13:23 AM	Bypass valve closed
2/6/2012	9:13:23 AM	Bubbler valve closed
2/6/2012	9:13:23 AM	Helium valve opened
2/6/2012	9:13:23 AM	Helium MFC set to  500.000000
2/6/2012	9:13:23 AM	H2 MFC set to  0.000000
2/6/2012	9:13:23 AM	BCl3 MFC set to  0.000000
2/6/2012	9:13:23 AM	PH3 MFC set to  0.000000
2/6/2012	9:13:23 AM	SiCl4 MFC set to  0.000000
2/6/2012	9:13:23 AM	Bypass solenoid MFC set to  0.000000
2/6/2012	9:13:23 AM	Tube furnace set to 0
2/6/2012	9:14:27 AM	Helium valve closed
2/6/2012	9:14:27 AM	H2 valve closed
2/6/2012	9:14:27 AM	BCl3 valve closed
2/6/2012	9:14:27 AM	PH3 valve closed
2/6/2012	9:14:27 AM	SiCl4 pre valve closed
2/6/2012	9:14:27 AM	SiCl4 post valve closed
2/6/2012	9:14:27 AM	Main Vac valve closed
2/6/2012	9:14:27 AM	Bypass valve closed
2/6/2012	9:14:27 AM	Bubbler valve closed
2/6/2012	9:14:27 AM	Helium MFC set to  0.000000
2/6/2012	9:14:27 AM	H2 MFC set to  0.000000
2/6/2012	9:14:27 AM	BCl3 MFC set to  0.000000
2/6/2012	9:14:27 AM	PH3 MFC set to  0.000000
2/6/2012	9:14:27 AM	SiCl4 MFC set to  0.000000
2/6/2012	9:14:27 AM	Bypass solenoid MFC set to  0.000000
2/6/2012	9:14:28 AM	Tube furnace set to 0
2/6/2012	9:14:29 AM	Run finished at 9:14 AM
2/6/2012	9:14:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/6/2012	9:16:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/6/2012	9:16:27 AM	Recipe started at 9:16 AM
2/6/2012	9:16:27 AM	Helium valve closed
2/6/2012	9:16:27 AM	H2 valve closed
2/6/2012	9:16:27 AM	BCl3 valve closed
2/6/2012	9:16:27 AM	PH3 valve closed
2/6/2012	9:16:27 AM	SiCl4 pre valve closed
2/6/2012	9:16:27 AM	SiCl4 post valve closed
2/6/2012	9:16:27 AM	Main Vac valve closed
2/6/2012	9:16:27 AM	Bubbler valve closed
2/6/2012	9:16:27 AM	Bypass valve opened
2/6/2012	9:16:27 AM	Helium MFC set to  0.000000
2/6/2012	9:16:27 AM	H2 MFC set to  0.000000
2/6/2012	9:16:27 AM	BCl3 MFC set to  0.000000
2/6/2012	9:16:27 AM	PH3 MFC set to  0.000000
2/6/2012	9:16:27 AM	SiCl4 MFC set to  0.000000
2/6/2012	9:16:27 AM	Bypass solenoid MFC set to  0.000000
2/6/2012	9:16:27 AM	Tube furnace set to 0
2/6/2012	9:17:25 AM	Helium valve closed
2/6/2012	9:17:25 AM	H2 valve closed
2/6/2012	9:17:25 AM	BCl3 valve closed
2/6/2012	9:17:25 AM	PH3 valve closed
2/6/2012	9:17:25 AM	SiCl4 pre valve closed
2/6/2012	9:17:25 AM	SiCl4 post valve closed
2/6/2012	9:17:25 AM	Main Vac valve closed
2/6/2012	9:17:25 AM	Bubbler valve closed
2/6/2012	9:17:25 AM	Bypass valve opened
2/6/2012	9:17:25 AM	Helium MFC set to  0.000000
2/6/2012	9:17:25 AM	H2 MFC set to  0.000000
2/6/2012	9:17:25 AM	BCl3 MFC set to  0.000000
2/6/2012	9:17:25 AM	PH3 MFC set to  0.000000
2/6/2012	9:17:25 AM	SiCl4 MFC set to  0.000000
2/6/2012	9:17:25 AM	Bypass solenoid MFC set to  0.000000
2/6/2012	9:17:25 AM	Tube furnace set to 0
2/6/2012	9:18:25 AM	Helium valve closed
2/6/2012	9:18:25 AM	H2 valve closed
2/6/2012	9:18:25 AM	BCl3 valve closed
2/6/2012	9:18:25 AM	PH3 valve closed
2/6/2012	9:18:25 AM	SiCl4 pre valve closed
2/6/2012	9:18:25 AM	SiCl4 post valve closed
2/6/2012	9:18:25 AM	Bypass valve closed
2/6/2012	9:18:25 AM	Bubbler valve closed
2/6/2012	9:18:25 AM	Main Vac valve opened
2/6/2012	9:18:25 AM	Helium MFC set to  0.000000
2/6/2012	9:18:25 AM	H2 MFC set to  0.000000
2/6/2012	9:18:25 AM	BCl3 MFC set to  0.000000
2/6/2012	9:18:25 AM	PH3 MFC set to  0.000000
2/6/2012	9:18:25 AM	SiCl4 MFC set to  0.000000
2/6/2012	9:18:25 AM	Bypass solenoid MFC set to  0.000000
2/6/2012	9:18:25 AM	Tube furnace set to 0
2/6/2012	9:18:26 AM	Run finished at 9:18 AM
2/6/2012	9:18:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/6/2012	9:59:21 AM	Main Vac valve closed
2/6/2012	10:00:06 AM	Main Vac valve opened
2/6/2012	10:01:39 AM	Recipe started at 10:01 AM
2/6/2012	10:01:39 AM	Helium valve closed
2/6/2012	10:01:39 AM	H2 valve closed
2/6/2012	10:01:39 AM	BCl3 valve closed
2/6/2012	10:01:39 AM	PH3 valve closed
2/6/2012	10:01:39 AM	SiCl4 pre valve closed
2/6/2012	10:01:39 AM	SiCl4 post valve closed
2/6/2012	10:01:39 AM	Main Vac valve closed
2/6/2012	10:01:39 AM	Bypass valve closed
2/6/2012	10:01:39 AM	Bubbler valve closed
2/6/2012	10:01:39 AM	Helium MFC set to  0.000000
2/6/2012	10:01:39 AM	H2 MFC set to  0.000000
2/6/2012	10:01:39 AM	BCl3 MFC set to  0.000000
2/6/2012	10:01:39 AM	PH3 MFC set to  0.000000
2/6/2012	10:01:39 AM	SiCl4 MFC set to  0.000000
2/6/2012	10:01:39 AM	Bypass solenoid MFC set to  0.000000
2/6/2012	10:01:39 AM	Tube furnace set to 0
2/6/2012	10:01:42 AM	Helium valve closed
2/6/2012	10:01:42 AM	BCl3 valve closed
2/6/2012	10:01:42 AM	PH3 valve closed
2/6/2012	10:01:42 AM	SiCl4 pre valve closed
2/6/2012	10:01:42 AM	SiCl4 post valve closed
2/6/2012	10:01:42 AM	Main Vac valve closed
2/6/2012	10:01:42 AM	Bypass valve closed
2/6/2012	10:01:42 AM	Bubbler valve closed
2/6/2012	10:01:42 AM	H2 valve opened
2/6/2012	10:01:42 AM	Helium MFC set to  0.000000
2/6/2012	10:01:42 AM	H2 MFC set to  500.000000
2/6/2012	10:01:42 AM	BCl3 MFC set to  0.000000
2/6/2012	10:01:42 AM	PH3 MFC set to  0.000000
2/6/2012	10:01:42 AM	SiCl4 MFC set to  0.000000
2/6/2012	10:01:42 AM	Bypass solenoid MFC set to  0.000000
2/6/2012	10:01:42 AM	Tube furnace set to 0
2/6/2012	10:02:51 AM	Helium valve closed
2/6/2012	10:02:51 AM	BCl3 valve closed
2/6/2012	10:02:51 AM	PH3 valve closed
2/6/2012	10:02:51 AM	SiCl4 pre valve closed
2/6/2012	10:02:51 AM	SiCl4 post valve closed
2/6/2012	10:02:51 AM	Main Vac valve closed
2/6/2012	10:02:51 AM	Bypass valve closed
2/6/2012	10:02:51 AM	H2 valve opened
2/6/2012	10:02:51 AM	Bubbler valve opened
2/6/2012	10:02:51 AM	Helium MFC set to  0.000000
2/6/2012	10:02:51 AM	H2 MFC set to  500.000000
2/6/2012	10:02:51 AM	BCl3 MFC set to  0.000000
2/6/2012	10:02:51 AM	PH3 MFC set to  0.000000
2/6/2012	10:02:51 AM	SiCl4 MFC set to  0.000000
2/6/2012	10:02:51 AM	Bypass solenoid MFC set to  0.000000
2/6/2012	10:02:52 AM	Tube furnace set to 0
2/6/2012	10:02:53 AM	Helium valve closed
2/6/2012	10:02:53 AM	BCl3 valve closed
2/6/2012	10:02:53 AM	PH3 valve closed
2/6/2012	10:02:53 AM	SiCl4 pre valve closed
2/6/2012	10:02:53 AM	SiCl4 post valve closed
2/6/2012	10:02:53 AM	Main Vac valve closed
2/6/2012	10:02:53 AM	Bypass valve closed
2/6/2012	10:02:53 AM	H2 valve opened
2/6/2012	10:02:53 AM	Bubbler valve opened
2/6/2012	10:02:53 AM	Helium MFC set to  0.000000
2/6/2012	10:02:53 AM	H2 MFC set to  500.000000
2/6/2012	10:02:53 AM	BCl3 MFC set to  0.000000
2/6/2012	10:02:53 AM	PH3 MFC set to  0.000000
2/6/2012	10:02:53 AM	SiCl4 MFC set to  0.000000
2/6/2012	10:02:53 AM	Bypass solenoid MFC set to  0.000000
2/6/2012	10:02:53 AM	Tube furnace set to 950
2/6/2012	10:17:53 AM	Helium valve closed
2/6/2012	10:17:53 AM	PH3 valve closed
2/6/2012	10:17:53 AM	SiCl4 pre valve closed
2/6/2012	10:17:53 AM	SiCl4 post valve closed
2/6/2012	10:17:53 AM	Main Vac valve closed
2/6/2012	10:17:53 AM	Bypass valve closed
2/6/2012	10:17:53 AM	H2 valve opened
2/6/2012	10:17:53 AM	BCl3 valve opened
2/6/2012	10:17:53 AM	Bubbler valve opened
2/6/2012	10:17:53 AM	Helium MFC set to  0.000000
2/6/2012	10:17:53 AM	H2 MFC set to  400.000000
2/6/2012	10:17:53 AM	BCl3 MFC set to  20.000000
2/6/2012	10:17:53 AM	PH3 MFC set to  0.000000
2/6/2012	10:17:53 AM	SiCl4 MFC set to  0.000000
2/6/2012	10:17:53 AM	Bypass solenoid MFC set to  0.000000
2/6/2012	10:17:53 AM	Tube furnace set to 950
2/6/2012	10:47:53 AM	Helium valve closed
2/6/2012	10:47:53 AM	BCl3 valve closed
2/6/2012	10:47:53 AM	PH3 valve closed
2/6/2012	10:47:53 AM	SiCl4 pre valve closed
2/6/2012	10:47:53 AM	SiCl4 post valve closed
2/6/2012	10:47:53 AM	Main Vac valve closed
2/6/2012	10:47:53 AM	Bypass valve closed
2/6/2012	10:47:53 AM	H2 valve opened
2/6/2012	10:47:53 AM	Bubbler valve opened
2/6/2012	10:47:53 AM	Helium MFC set to  0.000000
2/6/2012	10:47:53 AM	H2 MFC set to  500.000000
2/6/2012	10:47:53 AM	BCl3 MFC set to  0.000000
2/6/2012	10:47:53 AM	PH3 MFC set to  0.000000
2/6/2012	10:47:53 AM	SiCl4 MFC set to  0.000000
2/6/2012	10:47:53 AM	Bypass solenoid MFC set to  0.000000
2/6/2012	10:47:53 AM	Tube furnace set to 750
2/6/2012	10:52:53 AM	H2 valve closed
2/6/2012	10:52:53 AM	BCl3 valve closed
2/6/2012	10:52:53 AM	PH3 valve closed
2/6/2012	10:52:53 AM	SiCl4 pre valve closed
2/6/2012	10:52:53 AM	SiCl4 post valve closed
2/6/2012	10:52:53 AM	Main Vac valve closed
2/6/2012	10:52:53 AM	Bypass valve closed
2/6/2012	10:52:53 AM	Helium valve opened
2/6/2012	10:52:53 AM	Bubbler valve opened
2/6/2012	10:52:53 AM	Helium MFC set to  500.000000
2/6/2012	10:52:53 AM	H2 MFC set to  0.000000
2/6/2012	10:52:53 AM	BCl3 MFC set to  0.000000
2/6/2012	10:52:53 AM	PH3 MFC set to  0.000000
2/6/2012	10:52:53 AM	SiCl4 MFC set to  0.000000
2/6/2012	10:52:53 AM	Bypass solenoid MFC set to  0.000000
2/6/2012	10:52:53 AM	Tube furnace set to 0
2/6/2012	11:12:53 AM	Helium valve closed
2/6/2012	11:12:53 AM	H2 valve closed
2/6/2012	11:12:53 AM	BCl3 valve closed
2/6/2012	11:12:53 AM	PH3 valve closed
2/6/2012	11:12:53 AM	SiCl4 pre valve closed
2/6/2012	11:12:53 AM	SiCl4 post valve closed
2/6/2012	11:12:53 AM	Main Vac valve closed
2/6/2012	11:12:53 AM	Bypass valve closed
2/6/2012	11:12:53 AM	Bubbler valve closed
2/6/2012	11:12:53 AM	Helium MFC set to  0.000000
2/6/2012	11:12:53 AM	H2 MFC set to  0.000000
2/6/2012	11:12:53 AM	BCl3 MFC set to  0.000000
2/6/2012	11:12:53 AM	PH3 MFC set to  0.000000
2/6/2012	11:12:53 AM	SiCl4 MFC set to  0.000000
2/6/2012	11:12:53 AM	Bypass solenoid MFC set to  0.000000
2/6/2012	11:12:54 AM	Tube furnace set to 0
2/6/2012	11:12:55 AM	Run finished at 11:12 AM
2/6/2012	11:59:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/6/2012	11:59:12 AM	Recipe started at 11:59 AM
2/6/2012	11:59:12 AM	Helium valve closed
2/6/2012	11:59:12 AM	H2 valve closed
2/6/2012	11:59:12 AM	BCl3 valve closed
2/6/2012	11:59:12 AM	PH3 valve closed
2/6/2012	11:59:12 AM	SiCl4 pre valve closed
2/6/2012	11:59:12 AM	SiCl4 post valve closed
2/6/2012	11:59:12 AM	Main Vac valve closed
2/6/2012	11:59:12 AM	Bypass valve closed
2/6/2012	11:59:12 AM	Bubbler valve closed
2/6/2012	11:59:12 AM	Helium MFC set to  0.000000
2/6/2012	11:59:12 AM	H2 MFC set to  0.000000
2/6/2012	11:59:12 AM	BCl3 MFC set to  0.000000
2/6/2012	11:59:12 AM	PH3 MFC set to  0.000000
2/6/2012	11:59:12 AM	SiCl4 MFC set to  0.000000
2/6/2012	11:59:12 AM	Bypass solenoid MFC set to  0.000000
2/6/2012	11:59:12 AM	Tube furnace set to 0
2/6/2012	11:59:15 AM	H2 valve closed
2/6/2012	11:59:15 AM	BCl3 valve closed
2/6/2012	11:59:15 AM	PH3 valve closed
2/6/2012	11:59:15 AM	SiCl4 pre valve closed
2/6/2012	11:59:15 AM	SiCl4 post valve closed
2/6/2012	11:59:15 AM	Main Vac valve closed
2/6/2012	11:59:15 AM	Bypass valve closed
2/6/2012	11:59:15 AM	Bubbler valve closed
2/6/2012	11:59:15 AM	Helium valve opened
2/6/2012	11:59:15 AM	Helium MFC set to  500.000000
2/6/2012	11:59:15 AM	H2 MFC set to  0.000000
2/6/2012	11:59:15 AM	BCl3 MFC set to  0.000000
2/6/2012	11:59:15 AM	PH3 MFC set to  0.000000
2/6/2012	11:59:15 AM	SiCl4 MFC set to  0.000000
2/6/2012	11:59:15 AM	Bypass solenoid MFC set to  0.000000
2/6/2012	11:59:15 AM	Tube furnace set to 0
2/6/2012	11:59:22 AM	Helium valve closed
2/6/2012	11:59:22 AM	H2 valve closed
2/6/2012	11:59:22 AM	BCl3 valve closed
2/6/2012	11:59:22 AM	PH3 valve closed
2/6/2012	11:59:22 AM	SiCl4 pre valve closed
2/6/2012	11:59:22 AM	SiCl4 post valve closed
2/6/2012	11:59:22 AM	Main Vac valve closed
2/6/2012	11:59:22 AM	Bypass valve closed
2/6/2012	11:59:22 AM	Bubbler valve closed
2/6/2012	11:59:22 AM	Helium MFC set to  0.000000
2/6/2012	11:59:22 AM	H2 MFC set to  0.000000
2/6/2012	11:59:22 AM	BCl3 MFC set to  0.000000
2/6/2012	11:59:22 AM	PH3 MFC set to  0.000000
2/6/2012	11:59:22 AM	SiCl4 MFC set to  0.000000
2/6/2012	11:59:22 AM	Bypass solenoid MFC set to  0.000000
2/6/2012	11:59:22 AM	Tube furnace set to 0
2/6/2012	11:59:23 AM	Run finished at 11:59 AM
2/6/2012	11:59:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/6/2012	12:04:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/6/2012	12:04:40 PM	Recipe started at 12:04 PM
2/6/2012	12:04:40 PM	Helium valve closed
2/6/2012	12:04:40 PM	H2 valve closed
2/6/2012	12:04:40 PM	BCl3 valve closed
2/6/2012	12:04:40 PM	PH3 valve closed
2/6/2012	12:04:40 PM	SiCl4 pre valve closed
2/6/2012	12:04:40 PM	SiCl4 post valve closed
2/6/2012	12:04:40 PM	Main Vac valve closed
2/6/2012	12:04:40 PM	Bubbler valve closed
2/6/2012	12:04:40 PM	Bypass valve opened
2/6/2012	12:04:40 PM	Helium MFC set to  0.000000
2/6/2012	12:04:40 PM	H2 MFC set to  0.000000
2/6/2012	12:04:40 PM	BCl3 MFC set to  0.000000
2/6/2012	12:04:40 PM	PH3 MFC set to  0.000000
2/6/2012	12:04:40 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:04:40 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:04:40 PM	Tube furnace set to 0
2/6/2012	12:05:40 PM	Helium valve closed
2/6/2012	12:05:40 PM	H2 valve closed
2/6/2012	12:05:40 PM	BCl3 valve closed
2/6/2012	12:05:40 PM	PH3 valve closed
2/6/2012	12:05:40 PM	SiCl4 pre valve closed
2/6/2012	12:05:40 PM	SiCl4 post valve closed
2/6/2012	12:05:40 PM	Main Vac valve closed
2/6/2012	12:05:40 PM	Bubbler valve closed
2/6/2012	12:05:40 PM	Bypass valve opened
2/6/2012	12:05:40 PM	Helium MFC set to  0.000000
2/6/2012	12:05:40 PM	H2 MFC set to  0.000000
2/6/2012	12:05:40 PM	BCl3 MFC set to  0.000000
2/6/2012	12:05:40 PM	PH3 MFC set to  0.000000
2/6/2012	12:05:40 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:05:40 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:05:40 PM	Tube furnace set to 0
2/6/2012	12:06:01 PM	Helium valve closed
2/6/2012	12:06:01 PM	H2 valve closed
2/6/2012	12:06:01 PM	BCl3 valve closed
2/6/2012	12:06:01 PM	PH3 valve closed
2/6/2012	12:06:01 PM	SiCl4 pre valve closed
2/6/2012	12:06:01 PM	SiCl4 post valve closed
2/6/2012	12:06:01 PM	Bypass valve closed
2/6/2012	12:06:01 PM	Bubbler valve closed
2/6/2012	12:06:01 PM	Main Vac valve opened
2/6/2012	12:06:01 PM	Helium MFC set to  0.000000
2/6/2012	12:06:01 PM	H2 MFC set to  0.000000
2/6/2012	12:06:01 PM	BCl3 MFC set to  0.000000
2/6/2012	12:06:01 PM	PH3 MFC set to  0.000000
2/6/2012	12:06:01 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:06:01 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:06:02 PM	Tube furnace set to 0
2/6/2012	12:06:03 PM	Run finished at 12:06 PM
2/6/2012	12:06:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/6/2012	12:08:42 PM	Recipe started at 12:08 PM
2/6/2012	12:08:42 PM	Helium valve closed
2/6/2012	12:08:42 PM	H2 valve closed
2/6/2012	12:08:42 PM	BCl3 valve closed
2/6/2012	12:08:42 PM	PH3 valve closed
2/6/2012	12:08:42 PM	SiCl4 pre valve closed
2/6/2012	12:08:42 PM	SiCl4 post valve closed
2/6/2012	12:08:42 PM	Bypass valve closed
2/6/2012	12:08:42 PM	Bubbler valve closed
2/6/2012	12:08:42 PM	Main Vac valve opened
2/6/2012	12:08:42 PM	Helium MFC set to  0.000000
2/6/2012	12:08:42 PM	H2 MFC set to  0.000000
2/6/2012	12:08:42 PM	BCl3 MFC set to  0.000000
2/6/2012	12:08:42 PM	PH3 MFC set to  0.000000
2/6/2012	12:08:42 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:08:42 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:08:42 PM	Tube furnace set to 150
2/6/2012	12:09:12 PM	H2 valve closed
2/6/2012	12:09:12 PM	BCl3 valve closed
2/6/2012	12:09:12 PM	PH3 valve closed
2/6/2012	12:09:12 PM	SiCl4 pre valve closed
2/6/2012	12:09:12 PM	SiCl4 post valve closed
2/6/2012	12:09:12 PM	Bypass valve closed
2/6/2012	12:09:12 PM	Bubbler valve closed
2/6/2012	12:09:12 PM	Helium valve opened
2/6/2012	12:09:12 PM	Main Vac valve opened
2/6/2012	12:09:12 PM	Helium MFC set to  20.000000
2/6/2012	12:09:12 PM	H2 MFC set to  0.000000
2/6/2012	12:09:12 PM	BCl3 MFC set to  0.000000
2/6/2012	12:09:12 PM	PH3 MFC set to  0.000000
2/6/2012	12:09:12 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:09:12 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:09:12 PM	Tube furnace set to 150
2/6/2012	12:09:42 PM	Helium valve closed
2/6/2012	12:09:42 PM	H2 valve closed
2/6/2012	12:09:42 PM	BCl3 valve closed
2/6/2012	12:09:42 PM	PH3 valve closed
2/6/2012	12:09:42 PM	SiCl4 pre valve closed
2/6/2012	12:09:42 PM	SiCl4 post valve closed
2/6/2012	12:09:42 PM	Bypass valve closed
2/6/2012	12:09:42 PM	Bubbler valve closed
2/6/2012	12:09:42 PM	Main Vac valve opened
2/6/2012	12:09:42 PM	Helium MFC set to  0.000000
2/6/2012	12:09:42 PM	H2 MFC set to  0.000000
2/6/2012	12:09:42 PM	BCl3 MFC set to  0.000000
2/6/2012	12:09:42 PM	PH3 MFC set to  0.000000
2/6/2012	12:09:42 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:09:42 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:09:42 PM	Tube furnace set to 150
2/6/2012	12:10:12 PM	H2 valve closed
2/6/2012	12:10:12 PM	BCl3 valve closed
2/6/2012	12:10:12 PM	PH3 valve closed
2/6/2012	12:10:12 PM	SiCl4 pre valve closed
2/6/2012	12:10:12 PM	SiCl4 post valve closed
2/6/2012	12:10:12 PM	Bypass valve closed
2/6/2012	12:10:12 PM	Bubbler valve closed
2/6/2012	12:10:12 PM	Helium valve opened
2/6/2012	12:10:12 PM	Main Vac valve opened
2/6/2012	12:10:12 PM	Helium MFC set to  20.000000
2/6/2012	12:10:12 PM	H2 MFC set to  0.000000
2/6/2012	12:10:12 PM	BCl3 MFC set to  0.000000
2/6/2012	12:10:12 PM	PH3 MFC set to  0.000000
2/6/2012	12:10:12 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:10:12 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:10:13 PM	Tube furnace set to 150
2/6/2012	12:10:43 PM	Helium valve closed
2/6/2012	12:10:43 PM	H2 valve closed
2/6/2012	12:10:43 PM	BCl3 valve closed
2/6/2012	12:10:43 PM	PH3 valve closed
2/6/2012	12:10:43 PM	SiCl4 pre valve closed
2/6/2012	12:10:43 PM	SiCl4 post valve closed
2/6/2012	12:10:43 PM	Bypass valve closed
2/6/2012	12:10:43 PM	Bubbler valve closed
2/6/2012	12:10:43 PM	Main Vac valve opened
2/6/2012	12:10:43 PM	Helium MFC set to  0.000000
2/6/2012	12:10:43 PM	H2 MFC set to  0.000000
2/6/2012	12:10:43 PM	BCl3 MFC set to  0.000000
2/6/2012	12:10:43 PM	PH3 MFC set to  0.000000
2/6/2012	12:10:43 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:10:43 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:10:43 PM	Tube furnace set to 150
2/6/2012	12:11:13 PM	H2 valve closed
2/6/2012	12:11:13 PM	BCl3 valve closed
2/6/2012	12:11:13 PM	PH3 valve closed
2/6/2012	12:11:13 PM	SiCl4 pre valve closed
2/6/2012	12:11:13 PM	SiCl4 post valve closed
2/6/2012	12:11:13 PM	Bypass valve closed
2/6/2012	12:11:13 PM	Bubbler valve closed
2/6/2012	12:11:13 PM	Helium valve opened
2/6/2012	12:11:13 PM	Main Vac valve opened
2/6/2012	12:11:13 PM	Helium MFC set to  20.000000
2/6/2012	12:11:13 PM	H2 MFC set to  0.000000
2/6/2012	12:11:13 PM	BCl3 MFC set to  0.000000
2/6/2012	12:11:13 PM	PH3 MFC set to  0.000000
2/6/2012	12:11:13 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:11:13 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:11:13 PM	Tube furnace set to 150
2/6/2012	12:11:43 PM	Helium valve closed
2/6/2012	12:11:43 PM	H2 valve closed
2/6/2012	12:11:43 PM	BCl3 valve closed
2/6/2012	12:11:43 PM	PH3 valve closed
2/6/2012	12:11:43 PM	SiCl4 pre valve closed
2/6/2012	12:11:43 PM	SiCl4 post valve closed
2/6/2012	12:11:43 PM	Bypass valve closed
2/6/2012	12:11:43 PM	Bubbler valve closed
2/6/2012	12:11:43 PM	Main Vac valve opened
2/6/2012	12:11:43 PM	Helium MFC set to  0.000000
2/6/2012	12:11:43 PM	H2 MFC set to  0.000000
2/6/2012	12:11:43 PM	BCl3 MFC set to  0.000000
2/6/2012	12:11:43 PM	PH3 MFC set to  0.000000
2/6/2012	12:11:43 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:11:43 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:11:43 PM	Tube furnace set to 150
2/6/2012	12:12:13 PM	H2 valve closed
2/6/2012	12:12:13 PM	BCl3 valve closed
2/6/2012	12:12:13 PM	PH3 valve closed
2/6/2012	12:12:13 PM	SiCl4 pre valve closed
2/6/2012	12:12:13 PM	SiCl4 post valve closed
2/6/2012	12:12:13 PM	Bypass valve closed
2/6/2012	12:12:13 PM	Bubbler valve closed
2/6/2012	12:12:13 PM	Helium valve opened
2/6/2012	12:12:13 PM	Main Vac valve opened
2/6/2012	12:12:13 PM	Helium MFC set to  20.000000
2/6/2012	12:12:13 PM	H2 MFC set to  0.000000
2/6/2012	12:12:13 PM	BCl3 MFC set to  0.000000
2/6/2012	12:12:13 PM	PH3 MFC set to  0.000000
2/6/2012	12:12:13 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:12:13 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:12:13 PM	Tube furnace set to 150
2/6/2012	12:12:43 PM	Helium valve closed
2/6/2012	12:12:43 PM	H2 valve closed
2/6/2012	12:12:43 PM	BCl3 valve closed
2/6/2012	12:12:43 PM	PH3 valve closed
2/6/2012	12:12:43 PM	SiCl4 pre valve closed
2/6/2012	12:12:43 PM	SiCl4 post valve closed
2/6/2012	12:12:43 PM	Bypass valve closed
2/6/2012	12:12:43 PM	Bubbler valve closed
2/6/2012	12:12:43 PM	Main Vac valve opened
2/6/2012	12:12:43 PM	Helium MFC set to  0.000000
2/6/2012	12:12:43 PM	H2 MFC set to  0.000000
2/6/2012	12:12:43 PM	BCl3 MFC set to  0.000000
2/6/2012	12:12:43 PM	PH3 MFC set to  0.000000
2/6/2012	12:12:43 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:12:43 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:12:44 PM	Tube furnace set to 150
2/6/2012	12:13:14 PM	H2 valve closed
2/6/2012	12:13:14 PM	BCl3 valve closed
2/6/2012	12:13:14 PM	PH3 valve closed
2/6/2012	12:13:14 PM	SiCl4 pre valve closed
2/6/2012	12:13:14 PM	SiCl4 post valve closed
2/6/2012	12:13:14 PM	Bypass valve closed
2/6/2012	12:13:14 PM	Bubbler valve closed
2/6/2012	12:13:14 PM	Helium valve opened
2/6/2012	12:13:14 PM	Main Vac valve opened
2/6/2012	12:13:14 PM	Helium MFC set to  20.000000
2/6/2012	12:13:14 PM	H2 MFC set to  0.000000
2/6/2012	12:13:14 PM	BCl3 MFC set to  0.000000
2/6/2012	12:13:14 PM	PH3 MFC set to  0.000000
2/6/2012	12:13:14 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:13:14 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:13:14 PM	Tube furnace set to 150
2/6/2012	12:13:44 PM	Helium valve closed
2/6/2012	12:13:44 PM	H2 valve closed
2/6/2012	12:13:44 PM	BCl3 valve closed
2/6/2012	12:13:44 PM	PH3 valve closed
2/6/2012	12:13:44 PM	SiCl4 pre valve closed
2/6/2012	12:13:44 PM	SiCl4 post valve closed
2/6/2012	12:13:44 PM	Bypass valve closed
2/6/2012	12:13:44 PM	Bubbler valve closed
2/6/2012	12:13:44 PM	Main Vac valve opened
2/6/2012	12:13:44 PM	Helium MFC set to  0.000000
2/6/2012	12:13:44 PM	H2 MFC set to  0.000000
2/6/2012	12:13:44 PM	BCl3 MFC set to  0.000000
2/6/2012	12:13:44 PM	PH3 MFC set to  0.000000
2/6/2012	12:13:44 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:13:44 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:13:44 PM	Tube furnace set to 150
2/6/2012	12:14:14 PM	H2 valve closed
2/6/2012	12:14:14 PM	BCl3 valve closed
2/6/2012	12:14:14 PM	PH3 valve closed
2/6/2012	12:14:14 PM	SiCl4 pre valve closed
2/6/2012	12:14:14 PM	SiCl4 post valve closed
2/6/2012	12:14:14 PM	Bypass valve closed
2/6/2012	12:14:14 PM	Bubbler valve closed
2/6/2012	12:14:14 PM	Helium valve opened
2/6/2012	12:14:14 PM	Main Vac valve opened
2/6/2012	12:14:14 PM	Helium MFC set to  20.000000
2/6/2012	12:14:14 PM	H2 MFC set to  0.000000
2/6/2012	12:14:14 PM	BCl3 MFC set to  0.000000
2/6/2012	12:14:14 PM	PH3 MFC set to  0.000000
2/6/2012	12:14:14 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:14:14 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:14:14 PM	Tube furnace set to 150
2/6/2012	12:14:44 PM	Helium valve closed
2/6/2012	12:14:44 PM	H2 valve closed
2/6/2012	12:14:44 PM	BCl3 valve closed
2/6/2012	12:14:44 PM	PH3 valve closed
2/6/2012	12:14:44 PM	SiCl4 pre valve closed
2/6/2012	12:14:44 PM	SiCl4 post valve closed
2/6/2012	12:14:44 PM	Bypass valve closed
2/6/2012	12:14:44 PM	Bubbler valve closed
2/6/2012	12:14:44 PM	Main Vac valve opened
2/6/2012	12:14:44 PM	Helium MFC set to  0.000000
2/6/2012	12:14:44 PM	H2 MFC set to  0.000000
2/6/2012	12:14:44 PM	BCl3 MFC set to  0.000000
2/6/2012	12:14:44 PM	PH3 MFC set to  0.000000
2/6/2012	12:14:44 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:14:44 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:14:44 PM	Tube furnace set to 150
2/6/2012	12:15:14 PM	H2 valve closed
2/6/2012	12:15:14 PM	BCl3 valve closed
2/6/2012	12:15:14 PM	PH3 valve closed
2/6/2012	12:15:14 PM	SiCl4 pre valve closed
2/6/2012	12:15:14 PM	SiCl4 post valve closed
2/6/2012	12:15:14 PM	Bypass valve closed
2/6/2012	12:15:14 PM	Bubbler valve closed
2/6/2012	12:15:14 PM	Helium valve opened
2/6/2012	12:15:14 PM	Main Vac valve opened
2/6/2012	12:15:14 PM	Helium MFC set to  20.000000
2/6/2012	12:15:14 PM	H2 MFC set to  0.000000
2/6/2012	12:15:14 PM	BCl3 MFC set to  0.000000
2/6/2012	12:15:14 PM	PH3 MFC set to  0.000000
2/6/2012	12:15:14 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:15:14 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:15:15 PM	Tube furnace set to 150
2/6/2012	12:15:45 PM	Helium valve closed
2/6/2012	12:15:45 PM	H2 valve closed
2/6/2012	12:15:45 PM	BCl3 valve closed
2/6/2012	12:15:45 PM	PH3 valve closed
2/6/2012	12:15:45 PM	SiCl4 pre valve closed
2/6/2012	12:15:45 PM	SiCl4 post valve closed
2/6/2012	12:15:45 PM	Bypass valve closed
2/6/2012	12:15:45 PM	Bubbler valve closed
2/6/2012	12:15:45 PM	Main Vac valve opened
2/6/2012	12:15:45 PM	Helium MFC set to  0.000000
2/6/2012	12:15:45 PM	H2 MFC set to  0.000000
2/6/2012	12:15:45 PM	BCl3 MFC set to  0.000000
2/6/2012	12:15:45 PM	PH3 MFC set to  0.000000
2/6/2012	12:15:45 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:15:45 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:15:45 PM	Tube furnace set to 150
2/6/2012	12:16:15 PM	H2 valve closed
2/6/2012	12:16:15 PM	BCl3 valve closed
2/6/2012	12:16:15 PM	PH3 valve closed
2/6/2012	12:16:15 PM	SiCl4 pre valve closed
2/6/2012	12:16:15 PM	SiCl4 post valve closed
2/6/2012	12:16:15 PM	Bypass valve closed
2/6/2012	12:16:15 PM	Bubbler valve closed
2/6/2012	12:16:15 PM	Helium valve opened
2/6/2012	12:16:15 PM	Main Vac valve opened
2/6/2012	12:16:15 PM	Helium MFC set to  20.000000
2/6/2012	12:16:15 PM	H2 MFC set to  0.000000
2/6/2012	12:16:15 PM	BCl3 MFC set to  0.000000
2/6/2012	12:16:15 PM	PH3 MFC set to  0.000000
2/6/2012	12:16:15 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:16:15 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:16:15 PM	Tube furnace set to 150
2/6/2012	12:16:45 PM	Helium valve closed
2/6/2012	12:16:45 PM	H2 valve closed
2/6/2012	12:16:45 PM	BCl3 valve closed
2/6/2012	12:16:45 PM	PH3 valve closed
2/6/2012	12:16:45 PM	SiCl4 pre valve closed
2/6/2012	12:16:45 PM	SiCl4 post valve closed
2/6/2012	12:16:45 PM	Bypass valve closed
2/6/2012	12:16:45 PM	Bubbler valve closed
2/6/2012	12:16:45 PM	Main Vac valve opened
2/6/2012	12:16:45 PM	Helium MFC set to  0.000000
2/6/2012	12:16:45 PM	H2 MFC set to  0.000000
2/6/2012	12:16:45 PM	BCl3 MFC set to  0.000000
2/6/2012	12:16:45 PM	PH3 MFC set to  0.000000
2/6/2012	12:16:45 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:16:45 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:16:45 PM	Tube furnace set to 150
2/6/2012	12:17:15 PM	H2 valve closed
2/6/2012	12:17:15 PM	BCl3 valve closed
2/6/2012	12:17:15 PM	PH3 valve closed
2/6/2012	12:17:15 PM	SiCl4 pre valve closed
2/6/2012	12:17:15 PM	SiCl4 post valve closed
2/6/2012	12:17:15 PM	Bypass valve closed
2/6/2012	12:17:15 PM	Bubbler valve closed
2/6/2012	12:17:15 PM	Helium valve opened
2/6/2012	12:17:15 PM	Main Vac valve opened
2/6/2012	12:17:15 PM	Helium MFC set to  20.000000
2/6/2012	12:17:15 PM	H2 MFC set to  0.000000
2/6/2012	12:17:15 PM	BCl3 MFC set to  0.000000
2/6/2012	12:17:15 PM	PH3 MFC set to  0.000000
2/6/2012	12:17:15 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:17:15 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:17:15 PM	Tube furnace set to 150
2/6/2012	12:17:45 PM	Helium valve closed
2/6/2012	12:17:45 PM	H2 valve closed
2/6/2012	12:17:45 PM	BCl3 valve closed
2/6/2012	12:17:45 PM	PH3 valve closed
2/6/2012	12:17:45 PM	SiCl4 pre valve closed
2/6/2012	12:17:45 PM	SiCl4 post valve closed
2/6/2012	12:17:45 PM	Bypass valve closed
2/6/2012	12:17:46 PM	Bubbler valve closed
2/6/2012	12:17:46 PM	Main Vac valve opened
2/6/2012	12:17:46 PM	Helium MFC set to  0.000000
2/6/2012	12:17:46 PM	H2 MFC set to  0.000000
2/6/2012	12:17:46 PM	BCl3 MFC set to  0.000000
2/6/2012	12:17:46 PM	PH3 MFC set to  0.000000
2/6/2012	12:17:46 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:17:46 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:17:46 PM	Tube furnace set to 150
2/6/2012	12:18:16 PM	H2 valve closed
2/6/2012	12:18:16 PM	BCl3 valve closed
2/6/2012	12:18:16 PM	PH3 valve closed
2/6/2012	12:18:16 PM	SiCl4 pre valve closed
2/6/2012	12:18:16 PM	SiCl4 post valve closed
2/6/2012	12:18:16 PM	Bypass valve closed
2/6/2012	12:18:16 PM	Bubbler valve closed
2/6/2012	12:18:16 PM	Helium valve opened
2/6/2012	12:18:16 PM	Main Vac valve opened
2/6/2012	12:18:16 PM	Helium MFC set to  20.000000
2/6/2012	12:18:16 PM	H2 MFC set to  0.000000
2/6/2012	12:18:16 PM	BCl3 MFC set to  0.000000
2/6/2012	12:18:16 PM	PH3 MFC set to  0.000000
2/6/2012	12:18:16 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:18:16 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:18:16 PM	Tube furnace set to 150
2/6/2012	12:18:46 PM	Helium valve closed
2/6/2012	12:18:46 PM	H2 valve closed
2/6/2012	12:18:46 PM	BCl3 valve closed
2/6/2012	12:18:46 PM	PH3 valve closed
2/6/2012	12:18:46 PM	SiCl4 pre valve closed
2/6/2012	12:18:46 PM	SiCl4 post valve closed
2/6/2012	12:18:46 PM	Bypass valve closed
2/6/2012	12:18:46 PM	Bubbler valve closed
2/6/2012	12:18:46 PM	Main Vac valve opened
2/6/2012	12:18:46 PM	Helium MFC set to  0.000000
2/6/2012	12:18:46 PM	H2 MFC set to  0.000000
2/6/2012	12:18:46 PM	BCl3 MFC set to  0.000000
2/6/2012	12:18:46 PM	PH3 MFC set to  0.000000
2/6/2012	12:18:46 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:18:46 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:18:46 PM	Tube furnace set to 150
2/6/2012	12:18:47 PM	Run finished at 12:18 PM
2/6/2012	12:22:35 PM	Main Vac valve closed
2/6/2012	12:22:40 PM	Main Vac valve opened
2/6/2012	12:22:58 PM	Recipe started at 12:22 PM
2/6/2012	12:22:58 PM	Helium valve closed
2/6/2012	12:22:58 PM	H2 valve closed
2/6/2012	12:22:58 PM	BCl3 valve closed
2/6/2012	12:22:58 PM	PH3 valve closed
2/6/2012	12:22:58 PM	SiCl4 pre valve closed
2/6/2012	12:22:58 PM	SiCl4 post valve closed
2/6/2012	12:22:58 PM	Bypass valve closed
2/6/2012	12:22:58 PM	Bubbler valve closed
2/6/2012	12:22:58 PM	Main Vac valve opened
2/6/2012	12:22:58 PM	Helium MFC set to  0.000000
2/6/2012	12:22:58 PM	H2 MFC set to  0.000000
2/6/2012	12:22:58 PM	BCl3 MFC set to  0.000000
2/6/2012	12:22:58 PM	PH3 MFC set to  0.000000
2/6/2012	12:22:58 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:22:58 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:22:58 PM	Tube furnace set to 150
2/6/2012	12:23:28 PM	H2 valve closed
2/6/2012	12:23:28 PM	BCl3 valve closed
2/6/2012	12:23:28 PM	PH3 valve closed
2/6/2012	12:23:28 PM	SiCl4 pre valve closed
2/6/2012	12:23:28 PM	SiCl4 post valve closed
2/6/2012	12:23:28 PM	Bypass valve closed
2/6/2012	12:23:28 PM	Bubbler valve closed
2/6/2012	12:23:28 PM	Helium valve opened
2/6/2012	12:23:28 PM	Main Vac valve opened
2/6/2012	12:23:28 PM	Helium MFC set to  20.000000
2/6/2012	12:23:28 PM	H2 MFC set to  0.000000
2/6/2012	12:23:28 PM	BCl3 MFC set to  0.000000
2/6/2012	12:23:28 PM	PH3 MFC set to  0.000000
2/6/2012	12:23:28 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:23:28 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:23:28 PM	Tube furnace set to 150
2/6/2012	12:23:58 PM	Helium valve closed
2/6/2012	12:23:58 PM	H2 valve closed
2/6/2012	12:23:58 PM	BCl3 valve closed
2/6/2012	12:23:58 PM	PH3 valve closed
2/6/2012	12:23:58 PM	SiCl4 pre valve closed
2/6/2012	12:23:58 PM	SiCl4 post valve closed
2/6/2012	12:23:58 PM	Bypass valve closed
2/6/2012	12:23:58 PM	Bubbler valve closed
2/6/2012	12:23:58 PM	Main Vac valve opened
2/6/2012	12:23:58 PM	Helium MFC set to  0.000000
2/6/2012	12:23:58 PM	H2 MFC set to  0.000000
2/6/2012	12:23:58 PM	BCl3 MFC set to  0.000000
2/6/2012	12:23:58 PM	PH3 MFC set to  0.000000
2/6/2012	12:23:58 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:23:58 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:23:59 PM	Tube furnace set to 150
2/6/2012	12:24:29 PM	H2 valve closed
2/6/2012	12:24:29 PM	BCl3 valve closed
2/6/2012	12:24:29 PM	PH3 valve closed
2/6/2012	12:24:29 PM	SiCl4 pre valve closed
2/6/2012	12:24:29 PM	SiCl4 post valve closed
2/6/2012	12:24:29 PM	Bypass valve closed
2/6/2012	12:24:29 PM	Bubbler valve closed
2/6/2012	12:24:29 PM	Helium valve opened
2/6/2012	12:24:29 PM	Main Vac valve opened
2/6/2012	12:24:29 PM	Helium MFC set to  20.000000
2/6/2012	12:24:29 PM	H2 MFC set to  0.000000
2/6/2012	12:24:29 PM	BCl3 MFC set to  0.000000
2/6/2012	12:24:29 PM	PH3 MFC set to  0.000000
2/6/2012	12:24:29 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:24:29 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:24:29 PM	Tube furnace set to 150
2/6/2012	12:24:59 PM	Helium valve closed
2/6/2012	12:24:59 PM	H2 valve closed
2/6/2012	12:24:59 PM	BCl3 valve closed
2/6/2012	12:24:59 PM	PH3 valve closed
2/6/2012	12:24:59 PM	SiCl4 pre valve closed
2/6/2012	12:24:59 PM	SiCl4 post valve closed
2/6/2012	12:24:59 PM	Bypass valve closed
2/6/2012	12:24:59 PM	Bubbler valve closed
2/6/2012	12:24:59 PM	Main Vac valve opened
2/6/2012	12:24:59 PM	Helium MFC set to  0.000000
2/6/2012	12:24:59 PM	H2 MFC set to  0.000000
2/6/2012	12:24:59 PM	BCl3 MFC set to  0.000000
2/6/2012	12:24:59 PM	PH3 MFC set to  0.000000
2/6/2012	12:24:59 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:24:59 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:24:59 PM	Tube furnace set to 150
2/6/2012	12:25:29 PM	H2 valve closed
2/6/2012	12:25:29 PM	BCl3 valve closed
2/6/2012	12:25:29 PM	PH3 valve closed
2/6/2012	12:25:29 PM	SiCl4 pre valve closed
2/6/2012	12:25:29 PM	SiCl4 post valve closed
2/6/2012	12:25:29 PM	Bypass valve closed
2/6/2012	12:25:29 PM	Bubbler valve closed
2/6/2012	12:25:29 PM	Helium valve opened
2/6/2012	12:25:29 PM	Main Vac valve opened
2/6/2012	12:25:29 PM	Helium MFC set to  20.000000
2/6/2012	12:25:29 PM	H2 MFC set to  0.000000
2/6/2012	12:25:29 PM	BCl3 MFC set to  0.000000
2/6/2012	12:25:29 PM	PH3 MFC set to  0.000000
2/6/2012	12:25:29 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:25:29 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:25:29 PM	Tube furnace set to 150
2/6/2012	12:25:59 PM	Helium valve closed
2/6/2012	12:25:59 PM	H2 valve closed
2/6/2012	12:25:59 PM	BCl3 valve closed
2/6/2012	12:25:59 PM	PH3 valve closed
2/6/2012	12:25:59 PM	SiCl4 pre valve closed
2/6/2012	12:25:59 PM	SiCl4 post valve closed
2/6/2012	12:25:59 PM	Bypass valve closed
2/6/2012	12:25:59 PM	Bubbler valve closed
2/6/2012	12:25:59 PM	Main Vac valve opened
2/6/2012	12:25:59 PM	Helium MFC set to  0.000000
2/6/2012	12:25:59 PM	H2 MFC set to  0.000000
2/6/2012	12:25:59 PM	BCl3 MFC set to  0.000000
2/6/2012	12:25:59 PM	PH3 MFC set to  0.000000
2/6/2012	12:25:59 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:25:59 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:25:59 PM	Tube furnace set to 150
2/6/2012	12:26:29 PM	H2 valve closed
2/6/2012	12:26:29 PM	BCl3 valve closed
2/6/2012	12:26:29 PM	PH3 valve closed
2/6/2012	12:26:29 PM	SiCl4 pre valve closed
2/6/2012	12:26:29 PM	SiCl4 post valve closed
2/6/2012	12:26:29 PM	Bypass valve closed
2/6/2012	12:26:29 PM	Bubbler valve closed
2/6/2012	12:26:29 PM	Helium valve opened
2/6/2012	12:26:29 PM	Main Vac valve opened
2/6/2012	12:26:29 PM	Helium MFC set to  20.000000
2/6/2012	12:26:29 PM	H2 MFC set to  0.000000
2/6/2012	12:26:29 PM	BCl3 MFC set to  0.000000
2/6/2012	12:26:29 PM	PH3 MFC set to  0.000000
2/6/2012	12:26:29 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:26:29 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:26:30 PM	Tube furnace set to 150
2/6/2012	12:27:00 PM	Helium valve closed
2/6/2012	12:27:00 PM	H2 valve closed
2/6/2012	12:27:00 PM	BCl3 valve closed
2/6/2012	12:27:00 PM	PH3 valve closed
2/6/2012	12:27:00 PM	SiCl4 pre valve closed
2/6/2012	12:27:00 PM	SiCl4 post valve closed
2/6/2012	12:27:00 PM	Bypass valve closed
2/6/2012	12:27:00 PM	Bubbler valve closed
2/6/2012	12:27:00 PM	Main Vac valve opened
2/6/2012	12:27:00 PM	Helium MFC set to  0.000000
2/6/2012	12:27:00 PM	H2 MFC set to  0.000000
2/6/2012	12:27:00 PM	BCl3 MFC set to  0.000000
2/6/2012	12:27:00 PM	PH3 MFC set to  0.000000
2/6/2012	12:27:00 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:27:00 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:27:00 PM	Tube furnace set to 150
2/6/2012	12:27:30 PM	H2 valve closed
2/6/2012	12:27:30 PM	BCl3 valve closed
2/6/2012	12:27:30 PM	PH3 valve closed
2/6/2012	12:27:30 PM	SiCl4 pre valve closed
2/6/2012	12:27:30 PM	SiCl4 post valve closed
2/6/2012	12:27:30 PM	Bypass valve closed
2/6/2012	12:27:30 PM	Bubbler valve closed
2/6/2012	12:27:30 PM	Helium valve opened
2/6/2012	12:27:30 PM	Main Vac valve opened
2/6/2012	12:27:30 PM	Helium MFC set to  20.000000
2/6/2012	12:27:30 PM	H2 MFC set to  0.000000
2/6/2012	12:27:30 PM	BCl3 MFC set to  0.000000
2/6/2012	12:27:30 PM	PH3 MFC set to  0.000000
2/6/2012	12:27:30 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:27:30 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:27:30 PM	Tube furnace set to 150
2/6/2012	12:28:00 PM	Helium valve closed
2/6/2012	12:28:00 PM	H2 valve closed
2/6/2012	12:28:00 PM	BCl3 valve closed
2/6/2012	12:28:00 PM	PH3 valve closed
2/6/2012	12:28:00 PM	SiCl4 pre valve closed
2/6/2012	12:28:00 PM	SiCl4 post valve closed
2/6/2012	12:28:00 PM	Bypass valve closed
2/6/2012	12:28:00 PM	Bubbler valve closed
2/6/2012	12:28:00 PM	Main Vac valve opened
2/6/2012	12:28:00 PM	Helium MFC set to  0.000000
2/6/2012	12:28:00 PM	H2 MFC set to  0.000000
2/6/2012	12:28:00 PM	BCl3 MFC set to  0.000000
2/6/2012	12:28:00 PM	PH3 MFC set to  0.000000
2/6/2012	12:28:00 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:28:00 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:28:00 PM	Tube furnace set to 150
2/6/2012	12:28:30 PM	H2 valve closed
2/6/2012	12:28:30 PM	BCl3 valve closed
2/6/2012	12:28:30 PM	PH3 valve closed
2/6/2012	12:28:30 PM	SiCl4 pre valve closed
2/6/2012	12:28:30 PM	SiCl4 post valve closed
2/6/2012	12:28:30 PM	Bypass valve closed
2/6/2012	12:28:30 PM	Bubbler valve closed
2/6/2012	12:28:30 PM	Helium valve opened
2/6/2012	12:28:30 PM	Main Vac valve opened
2/6/2012	12:28:30 PM	Helium MFC set to  20.000000
2/6/2012	12:28:30 PM	H2 MFC set to  0.000000
2/6/2012	12:28:30 PM	BCl3 MFC set to  0.000000
2/6/2012	12:28:30 PM	PH3 MFC set to  0.000000
2/6/2012	12:28:30 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:28:30 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:28:30 PM	Tube furnace set to 150
2/6/2012	12:29:00 PM	Helium valve closed
2/6/2012	12:29:00 PM	H2 valve closed
2/6/2012	12:29:00 PM	BCl3 valve closed
2/6/2012	12:29:00 PM	PH3 valve closed
2/6/2012	12:29:00 PM	SiCl4 pre valve closed
2/6/2012	12:29:00 PM	SiCl4 post valve closed
2/6/2012	12:29:00 PM	Bypass valve closed
2/6/2012	12:29:00 PM	Bubbler valve closed
2/6/2012	12:29:00 PM	Main Vac valve opened
2/6/2012	12:29:00 PM	Helium MFC set to  0.000000
2/6/2012	12:29:00 PM	H2 MFC set to  0.000000
2/6/2012	12:29:00 PM	BCl3 MFC set to  0.000000
2/6/2012	12:29:00 PM	PH3 MFC set to  0.000000
2/6/2012	12:29:00 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:29:00 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:29:01 PM	Tube furnace set to 150
2/6/2012	12:29:31 PM	H2 valve closed
2/6/2012	12:29:31 PM	BCl3 valve closed
2/6/2012	12:29:31 PM	PH3 valve closed
2/6/2012	12:29:31 PM	SiCl4 pre valve closed
2/6/2012	12:29:31 PM	SiCl4 post valve closed
2/6/2012	12:29:31 PM	Bypass valve closed
2/6/2012	12:29:31 PM	Bubbler valve closed
2/6/2012	12:29:31 PM	Helium valve opened
2/6/2012	12:29:31 PM	Main Vac valve opened
2/6/2012	12:29:31 PM	Helium MFC set to  20.000000
2/6/2012	12:29:31 PM	H2 MFC set to  0.000000
2/6/2012	12:29:31 PM	BCl3 MFC set to  0.000000
2/6/2012	12:29:31 PM	PH3 MFC set to  0.000000
2/6/2012	12:29:31 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:29:31 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:29:31 PM	Tube furnace set to 150
2/6/2012	12:30:01 PM	Helium valve closed
2/6/2012	12:30:01 PM	H2 valve closed
2/6/2012	12:30:01 PM	BCl3 valve closed
2/6/2012	12:30:01 PM	PH3 valve closed
2/6/2012	12:30:01 PM	SiCl4 pre valve closed
2/6/2012	12:30:01 PM	SiCl4 post valve closed
2/6/2012	12:30:01 PM	Bypass valve closed
2/6/2012	12:30:01 PM	Bubbler valve closed
2/6/2012	12:30:01 PM	Main Vac valve opened
2/6/2012	12:30:01 PM	Helium MFC set to  0.000000
2/6/2012	12:30:01 PM	H2 MFC set to  0.000000
2/6/2012	12:30:01 PM	BCl3 MFC set to  0.000000
2/6/2012	12:30:01 PM	PH3 MFC set to  0.000000
2/6/2012	12:30:01 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:30:01 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:30:01 PM	Tube furnace set to 150
2/6/2012	12:30:31 PM	H2 valve closed
2/6/2012	12:30:31 PM	BCl3 valve closed
2/6/2012	12:30:31 PM	PH3 valve closed
2/6/2012	12:30:31 PM	SiCl4 pre valve closed
2/6/2012	12:30:31 PM	SiCl4 post valve closed
2/6/2012	12:30:31 PM	Bypass valve closed
2/6/2012	12:30:31 PM	Bubbler valve closed
2/6/2012	12:30:31 PM	Helium valve opened
2/6/2012	12:30:31 PM	Main Vac valve opened
2/6/2012	12:30:31 PM	Helium MFC set to  20.000000
2/6/2012	12:30:31 PM	H2 MFC set to  0.000000
2/6/2012	12:30:31 PM	BCl3 MFC set to  0.000000
2/6/2012	12:30:31 PM	PH3 MFC set to  0.000000
2/6/2012	12:30:31 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:30:31 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:30:31 PM	Tube furnace set to 150
2/6/2012	12:31:01 PM	Helium valve closed
2/6/2012	12:31:01 PM	H2 valve closed
2/6/2012	12:31:01 PM	BCl3 valve closed
2/6/2012	12:31:01 PM	PH3 valve closed
2/6/2012	12:31:01 PM	SiCl4 pre valve closed
2/6/2012	12:31:01 PM	SiCl4 post valve closed
2/6/2012	12:31:01 PM	Bypass valve closed
2/6/2012	12:31:01 PM	Bubbler valve closed
2/6/2012	12:31:01 PM	Main Vac valve opened
2/6/2012	12:31:01 PM	Helium MFC set to  0.000000
2/6/2012	12:31:01 PM	H2 MFC set to  0.000000
2/6/2012	12:31:01 PM	BCl3 MFC set to  0.000000
2/6/2012	12:31:01 PM	PH3 MFC set to  0.000000
2/6/2012	12:31:01 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:31:01 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:31:01 PM	Tube furnace set to 150
2/6/2012	12:31:31 PM	H2 valve closed
2/6/2012	12:31:31 PM	BCl3 valve closed
2/6/2012	12:31:31 PM	PH3 valve closed
2/6/2012	12:31:32 PM	SiCl4 pre valve closed
2/6/2012	12:31:32 PM	SiCl4 post valve closed
2/6/2012	12:31:32 PM	Bypass valve closed
2/6/2012	12:31:32 PM	Bubbler valve closed
2/6/2012	12:31:32 PM	Helium valve opened
2/6/2012	12:31:32 PM	Main Vac valve opened
2/6/2012	12:31:32 PM	Helium MFC set to  20.000000
2/6/2012	12:31:32 PM	H2 MFC set to  0.000000
2/6/2012	12:31:32 PM	BCl3 MFC set to  0.000000
2/6/2012	12:31:32 PM	PH3 MFC set to  0.000000
2/6/2012	12:31:32 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:31:32 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:31:32 PM	Tube furnace set to 150
2/6/2012	12:32:02 PM	Helium valve closed
2/6/2012	12:32:02 PM	H2 valve closed
2/6/2012	12:32:02 PM	BCl3 valve closed
2/6/2012	12:32:02 PM	PH3 valve closed
2/6/2012	12:32:02 PM	SiCl4 pre valve closed
2/6/2012	12:32:02 PM	SiCl4 post valve closed
2/6/2012	12:32:02 PM	Bypass valve closed
2/6/2012	12:32:02 PM	Bubbler valve closed
2/6/2012	12:32:02 PM	Main Vac valve opened
2/6/2012	12:32:02 PM	Helium MFC set to  0.000000
2/6/2012	12:32:02 PM	H2 MFC set to  0.000000
2/6/2012	12:32:02 PM	BCl3 MFC set to  0.000000
2/6/2012	12:32:02 PM	PH3 MFC set to  0.000000
2/6/2012	12:32:02 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:32:02 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:32:02 PM	Tube furnace set to 150
2/6/2012	12:32:32 PM	H2 valve closed
2/6/2012	12:32:32 PM	BCl3 valve closed
2/6/2012	12:32:32 PM	PH3 valve closed
2/6/2012	12:32:32 PM	SiCl4 pre valve closed
2/6/2012	12:32:32 PM	SiCl4 post valve closed
2/6/2012	12:32:32 PM	Bypass valve closed
2/6/2012	12:32:32 PM	Bubbler valve closed
2/6/2012	12:32:32 PM	Helium valve opened
2/6/2012	12:32:32 PM	Main Vac valve opened
2/6/2012	12:32:32 PM	Helium MFC set to  20.000000
2/6/2012	12:32:32 PM	H2 MFC set to  0.000000
2/6/2012	12:32:32 PM	BCl3 MFC set to  0.000000
2/6/2012	12:32:32 PM	PH3 MFC set to  0.000000
2/6/2012	12:32:32 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:32:32 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:32:32 PM	Tube furnace set to 150
2/6/2012	12:33:02 PM	Helium valve closed
2/6/2012	12:33:02 PM	H2 valve closed
2/6/2012	12:33:02 PM	BCl3 valve closed
2/6/2012	12:33:02 PM	PH3 valve closed
2/6/2012	12:33:02 PM	SiCl4 pre valve closed
2/6/2012	12:33:02 PM	SiCl4 post valve closed
2/6/2012	12:33:02 PM	Bypass valve closed
2/6/2012	12:33:02 PM	Bubbler valve closed
2/6/2012	12:33:02 PM	Main Vac valve opened
2/6/2012	12:33:02 PM	Helium MFC set to  0.000000
2/6/2012	12:33:02 PM	H2 MFC set to  0.000000
2/6/2012	12:33:02 PM	BCl3 MFC set to  0.000000
2/6/2012	12:33:02 PM	PH3 MFC set to  0.000000
2/6/2012	12:33:02 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:33:02 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:33:02 PM	Tube furnace set to 150
2/6/2012	12:33:03 PM	Run finished at 12:33 PM
2/6/2012	12:53:31 PM	Main Vac valve closed
2/6/2012	12:54:03 PM	Main Vac valve opened
2/6/2012	12:54:42 PM	Recipe started at 12:54 PM
2/6/2012	12:54:43 PM	Helium valve closed
2/6/2012	12:54:43 PM	H2 valve closed
2/6/2012	12:54:43 PM	BCl3 valve closed
2/6/2012	12:54:43 PM	PH3 valve closed
2/6/2012	12:54:43 PM	SiCl4 pre valve closed
2/6/2012	12:54:43 PM	SiCl4 post valve closed
2/6/2012	12:54:43 PM	Main Vac valve closed
2/6/2012	12:54:43 PM	Bypass valve closed
2/6/2012	12:54:43 PM	Bubbler valve closed
2/6/2012	12:54:43 PM	Helium MFC set to  0.000000
2/6/2012	12:54:43 PM	H2 MFC set to  0.000000
2/6/2012	12:54:43 PM	BCl3 MFC set to  0.000000
2/6/2012	12:54:43 PM	PH3 MFC set to  0.000000
2/6/2012	12:54:43 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:54:43 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:54:43 PM	Tube furnace set to 0
2/6/2012	12:54:46 PM	Helium valve closed
2/6/2012	12:54:46 PM	BCl3 valve closed
2/6/2012	12:54:46 PM	PH3 valve closed
2/6/2012	12:54:46 PM	SiCl4 pre valve closed
2/6/2012	12:54:46 PM	SiCl4 post valve closed
2/6/2012	12:54:46 PM	Main Vac valve closed
2/6/2012	12:54:46 PM	Bypass valve closed
2/6/2012	12:54:46 PM	Bubbler valve closed
2/6/2012	12:54:46 PM	H2 valve opened
2/6/2012	12:54:46 PM	Helium MFC set to  0.000000
2/6/2012	12:54:46 PM	H2 MFC set to  500.000000
2/6/2012	12:54:46 PM	BCl3 MFC set to  0.000000
2/6/2012	12:54:46 PM	PH3 MFC set to  0.000000
2/6/2012	12:54:46 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:54:46 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:54:46 PM	Tube furnace set to 0
2/6/2012	12:55:51 PM	Helium valve closed
2/6/2012	12:55:51 PM	BCl3 valve closed
2/6/2012	12:55:51 PM	PH3 valve closed
2/6/2012	12:55:51 PM	SiCl4 pre valve closed
2/6/2012	12:55:51 PM	SiCl4 post valve closed
2/6/2012	12:55:51 PM	Main Vac valve closed
2/6/2012	12:55:51 PM	Bypass valve closed
2/6/2012	12:55:51 PM	H2 valve opened
2/6/2012	12:55:51 PM	Bubbler valve opened
2/6/2012	12:55:51 PM	Helium MFC set to  0.000000
2/6/2012	12:55:51 PM	H2 MFC set to  500.000000
2/6/2012	12:55:51 PM	BCl3 MFC set to  0.000000
2/6/2012	12:55:51 PM	PH3 MFC set to  0.000000
2/6/2012	12:55:51 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:55:51 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:55:52 PM	Tube furnace set to 0
2/6/2012	12:55:53 PM	Helium valve closed
2/6/2012	12:55:53 PM	BCl3 valve closed
2/6/2012	12:55:53 PM	PH3 valve closed
2/6/2012	12:55:53 PM	SiCl4 pre valve closed
2/6/2012	12:55:53 PM	SiCl4 post valve closed
2/6/2012	12:55:53 PM	Main Vac valve closed
2/6/2012	12:55:53 PM	Bypass valve closed
2/6/2012	12:55:53 PM	H2 valve opened
2/6/2012	12:55:53 PM	Bubbler valve opened
2/6/2012	12:55:53 PM	Helium MFC set to  0.000000
2/6/2012	12:55:53 PM	H2 MFC set to  500.000000
2/6/2012	12:55:53 PM	BCl3 MFC set to  0.000000
2/6/2012	12:55:53 PM	PH3 MFC set to  0.000000
2/6/2012	12:55:53 PM	SiCl4 MFC set to  0.000000
2/6/2012	12:55:53 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	12:55:53 PM	Tube furnace set to 950
2/6/2012	1:10:53 PM	Helium valve closed
2/6/2012	1:10:53 PM	PH3 valve closed
2/6/2012	1:10:53 PM	SiCl4 pre valve closed
2/6/2012	1:10:53 PM	SiCl4 post valve closed
2/6/2012	1:10:53 PM	Main Vac valve closed
2/6/2012	1:10:53 PM	Bypass valve closed
2/6/2012	1:10:53 PM	H2 valve opened
2/6/2012	1:10:53 PM	BCl3 valve opened
2/6/2012	1:10:53 PM	Bubbler valve opened
2/6/2012	1:10:53 PM	Helium MFC set to  0.000000
2/6/2012	1:10:53 PM	H2 MFC set to  400.000000
2/6/2012	1:10:53 PM	BCl3 MFC set to  20.000000
2/6/2012	1:10:53 PM	PH3 MFC set to  0.000000
2/6/2012	1:10:53 PM	SiCl4 MFC set to  0.000000
2/6/2012	1:10:53 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	1:10:53 PM	Tube furnace set to 950
2/6/2012	1:40:53 PM	Helium valve closed
2/6/2012	1:40:53 PM	BCl3 valve closed
2/6/2012	1:40:53 PM	PH3 valve closed
2/6/2012	1:40:53 PM	SiCl4 pre valve closed
2/6/2012	1:40:53 PM	SiCl4 post valve closed
2/6/2012	1:40:53 PM	Main Vac valve closed
2/6/2012	1:40:53 PM	Bypass valve closed
2/6/2012	1:40:53 PM	H2 valve opened
2/6/2012	1:40:53 PM	Bubbler valve opened
2/6/2012	1:40:53 PM	Helium MFC set to  0.000000
2/6/2012	1:40:53 PM	H2 MFC set to  500.000000
2/6/2012	1:40:53 PM	BCl3 MFC set to  0.000000
2/6/2012	1:40:53 PM	PH3 MFC set to  0.000000
2/6/2012	1:40:53 PM	SiCl4 MFC set to  0.000000
2/6/2012	1:40:53 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	1:40:53 PM	Tube furnace set to 750
2/6/2012	1:45:53 PM	H2 valve closed
2/6/2012	1:45:53 PM	BCl3 valve closed
2/6/2012	1:45:53 PM	PH3 valve closed
2/6/2012	1:45:53 PM	SiCl4 pre valve closed
2/6/2012	1:45:53 PM	SiCl4 post valve closed
2/6/2012	1:45:53 PM	Main Vac valve closed
2/6/2012	1:45:53 PM	Bypass valve closed
2/6/2012	1:45:53 PM	Helium valve opened
2/6/2012	1:45:53 PM	Bubbler valve opened
2/6/2012	1:45:53 PM	Helium MFC set to  500.000000
2/6/2012	1:45:53 PM	H2 MFC set to  0.000000
2/6/2012	1:45:53 PM	BCl3 MFC set to  0.000000
2/6/2012	1:45:53 PM	PH3 MFC set to  0.000000
2/6/2012	1:45:53 PM	SiCl4 MFC set to  0.000000
2/6/2012	1:45:53 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	1:45:53 PM	Tube furnace set to 0
2/6/2012	1:57:05 PM	Helium valve closed
2/6/2012	1:57:05 PM	H2 valve closed
2/6/2012	1:57:05 PM	BCl3 valve closed
2/6/2012	1:57:05 PM	PH3 valve closed
2/6/2012	1:57:05 PM	SiCl4 pre valve closed
2/6/2012	1:57:05 PM	SiCl4 post valve closed
2/6/2012	1:57:05 PM	Main Vac valve closed
2/6/2012	1:57:05 PM	Bypass valve closed
2/6/2012	1:57:05 PM	Bubbler valve closed
2/6/2012	1:57:05 PM	Helium MFC set to  0.000000
2/6/2012	1:57:05 PM	H2 MFC set to  0.000000
2/6/2012	1:57:05 PM	BCl3 MFC set to  0.000000
2/6/2012	1:57:05 PM	PH3 MFC set to  0.000000
2/6/2012	1:57:05 PM	SiCl4 MFC set to  0.000000
2/6/2012	1:57:05 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	1:57:05 PM	Tube furnace set to 0
2/6/2012	1:57:06 PM	Run finished at 1:57 PM
2/6/2012	1:59:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/6/2012	1:59:00 PM	Recipe started at 1:59 PM
2/6/2012	1:59:01 PM	Helium valve closed
2/6/2012	1:59:01 PM	H2 valve closed
2/6/2012	1:59:01 PM	BCl3 valve closed
2/6/2012	1:59:01 PM	PH3 valve closed
2/6/2012	1:59:01 PM	SiCl4 pre valve closed
2/6/2012	1:59:01 PM	SiCl4 post valve closed
2/6/2012	1:59:01 PM	Main Vac valve closed
2/6/2012	1:59:01 PM	Bubbler valve closed
2/6/2012	1:59:01 PM	Bypass valve opened
2/6/2012	1:59:01 PM	Helium MFC set to  0.000000
2/6/2012	1:59:01 PM	H2 MFC set to  0.000000
2/6/2012	1:59:01 PM	BCl3 MFC set to  0.000000
2/6/2012	1:59:01 PM	PH3 MFC set to  0.000000
2/6/2012	1:59:01 PM	SiCl4 MFC set to  0.000000
2/6/2012	1:59:01 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	1:59:01 PM	Tube furnace set to 0
2/6/2012	1:59:54 PM	Helium valve closed
2/6/2012	1:59:54 PM	H2 valve closed
2/6/2012	1:59:54 PM	BCl3 valve closed
2/6/2012	1:59:54 PM	PH3 valve closed
2/6/2012	1:59:54 PM	SiCl4 pre valve closed
2/6/2012	1:59:54 PM	SiCl4 post valve closed
2/6/2012	1:59:54 PM	Main Vac valve closed
2/6/2012	1:59:54 PM	Bubbler valve closed
2/6/2012	1:59:54 PM	Bypass valve opened
2/6/2012	1:59:54 PM	Helium MFC set to  0.000000
2/6/2012	1:59:54 PM	H2 MFC set to  0.000000
2/6/2012	1:59:54 PM	BCl3 MFC set to  0.000000
2/6/2012	1:59:54 PM	PH3 MFC set to  0.000000
2/6/2012	1:59:54 PM	SiCl4 MFC set to  0.000000
2/6/2012	1:59:54 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	1:59:55 PM	Tube furnace set to 0
2/6/2012	2:00:55 PM	Helium valve closed
2/6/2012	2:00:55 PM	H2 valve closed
2/6/2012	2:00:55 PM	BCl3 valve closed
2/6/2012	2:00:55 PM	PH3 valve closed
2/6/2012	2:00:55 PM	SiCl4 pre valve closed
2/6/2012	2:00:55 PM	SiCl4 post valve closed
2/6/2012	2:00:55 PM	Bypass valve closed
2/6/2012	2:00:55 PM	Bubbler valve closed
2/6/2012	2:00:55 PM	Main Vac valve opened
2/6/2012	2:00:55 PM	Helium MFC set to  0.000000
2/6/2012	2:00:55 PM	H2 MFC set to  0.000000
2/6/2012	2:00:55 PM	BCl3 MFC set to  0.000000
2/6/2012	2:00:55 PM	PH3 MFC set to  0.000000
2/6/2012	2:00:55 PM	SiCl4 MFC set to  0.000000
2/6/2012	2:00:55 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	2:00:55 PM	Tube furnace set to 0
2/6/2012	2:00:56 PM	Run finished at 2:00 PM
2/6/2012	2:00:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/6/2012	3:48:31 PM	Main Vac valve closed
2/6/2012	3:49:02 PM	Main Vac valve opened
2/6/2012	3:49:15 PM	Recipe started at 3:49 PM
2/6/2012	3:49:15 PM	Helium valve closed
2/6/2012	3:49:15 PM	H2 valve closed
2/6/2012	3:49:15 PM	BCl3 valve closed
2/6/2012	3:49:15 PM	PH3 valve closed
2/6/2012	3:49:15 PM	SiCl4 pre valve closed
2/6/2012	3:49:15 PM	SiCl4 post valve closed
2/6/2012	3:49:15 PM	Main Vac valve closed
2/6/2012	3:49:15 PM	Bypass valve closed
2/6/2012	3:49:15 PM	Bubbler valve closed
2/6/2012	3:49:15 PM	Helium MFC set to  0.000000
2/6/2012	3:49:15 PM	H2 MFC set to  0.000000
2/6/2012	3:49:15 PM	BCl3 MFC set to  0.000000
2/6/2012	3:49:15 PM	PH3 MFC set to  0.000000
2/6/2012	3:49:15 PM	SiCl4 MFC set to  0.000000
2/6/2012	3:49:15 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	3:49:15 PM	Tube furnace set to 0
2/6/2012	3:49:18 PM	Helium valve closed
2/6/2012	3:49:18 PM	BCl3 valve closed
2/6/2012	3:49:18 PM	PH3 valve closed
2/6/2012	3:49:18 PM	SiCl4 pre valve closed
2/6/2012	3:49:18 PM	SiCl4 post valve closed
2/6/2012	3:49:18 PM	Main Vac valve closed
2/6/2012	3:49:18 PM	Bypass valve closed
2/6/2012	3:49:18 PM	Bubbler valve closed
2/6/2012	3:49:18 PM	H2 valve opened
2/6/2012	3:49:18 PM	Helium MFC set to  0.000000
2/6/2012	3:49:18 PM	H2 MFC set to  500.000000
2/6/2012	3:49:18 PM	BCl3 MFC set to  0.000000
2/6/2012	3:49:18 PM	PH3 MFC set to  0.000000
2/6/2012	3:49:18 PM	SiCl4 MFC set to  0.000000
2/6/2012	3:49:18 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	3:49:18 PM	Tube furnace set to 0
2/6/2012	3:50:28 PM	Helium valve closed
2/6/2012	3:50:28 PM	BCl3 valve closed
2/6/2012	3:50:28 PM	PH3 valve closed
2/6/2012	3:50:28 PM	SiCl4 pre valve closed
2/6/2012	3:50:28 PM	SiCl4 post valve closed
2/6/2012	3:50:28 PM	Main Vac valve closed
2/6/2012	3:50:28 PM	Bypass valve closed
2/6/2012	3:50:28 PM	H2 valve opened
2/6/2012	3:50:28 PM	Bubbler valve opened
2/6/2012	3:50:28 PM	Helium MFC set to  0.000000
2/6/2012	3:50:28 PM	H2 MFC set to  500.000000
2/6/2012	3:50:28 PM	BCl3 MFC set to  0.000000
2/6/2012	3:50:28 PM	PH3 MFC set to  0.000000
2/6/2012	3:50:28 PM	SiCl4 MFC set to  0.000000
2/6/2012	3:50:28 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	3:50:28 PM	Tube furnace set to 0
2/6/2012	3:50:29 PM	Helium valve closed
2/6/2012	3:50:29 PM	BCl3 valve closed
2/6/2012	3:50:29 PM	PH3 valve closed
2/6/2012	3:50:29 PM	SiCl4 pre valve closed
2/6/2012	3:50:29 PM	SiCl4 post valve closed
2/6/2012	3:50:29 PM	Main Vac valve closed
2/6/2012	3:50:29 PM	Bypass valve closed
2/6/2012	3:50:29 PM	H2 valve opened
2/6/2012	3:50:29 PM	Bubbler valve opened
2/6/2012	3:50:29 PM	Helium MFC set to  0.000000
2/6/2012	3:50:29 PM	H2 MFC set to  500.000000
2/6/2012	3:50:29 PM	BCl3 MFC set to  0.000000
2/6/2012	3:50:29 PM	PH3 MFC set to  0.000000
2/6/2012	3:50:29 PM	SiCl4 MFC set to  0.000000
2/6/2012	3:50:29 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	3:50:29 PM	Tube furnace set to 950
2/6/2012	4:05:29 PM	Helium valve closed
2/6/2012	4:05:29 PM	PH3 valve closed
2/6/2012	4:05:29 PM	SiCl4 pre valve closed
2/6/2012	4:05:29 PM	SiCl4 post valve closed
2/6/2012	4:05:29 PM	Main Vac valve closed
2/6/2012	4:05:29 PM	Bypass valve closed
2/6/2012	4:05:29 PM	H2 valve opened
2/6/2012	4:05:29 PM	BCl3 valve opened
2/6/2012	4:05:29 PM	Bubbler valve opened
2/6/2012	4:05:29 PM	Helium MFC set to  0.000000
2/6/2012	4:05:29 PM	H2 MFC set to  400.000000
2/6/2012	4:05:29 PM	BCl3 MFC set to  20.000000
2/6/2012	4:05:29 PM	PH3 MFC set to  0.000000
2/6/2012	4:05:29 PM	SiCl4 MFC set to  0.000000
2/6/2012	4:05:29 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	4:05:29 PM	Tube furnace set to 950
2/6/2012	4:35:29 PM	Helium valve closed
2/6/2012	4:35:29 PM	BCl3 valve closed
2/6/2012	4:35:29 PM	PH3 valve closed
2/6/2012	4:35:29 PM	SiCl4 pre valve closed
2/6/2012	4:35:29 PM	SiCl4 post valve closed
2/6/2012	4:35:29 PM	Main Vac valve closed
2/6/2012	4:35:29 PM	Bypass valve closed
2/6/2012	4:35:29 PM	H2 valve opened
2/6/2012	4:35:29 PM	Bubbler valve opened
2/6/2012	4:35:29 PM	Helium MFC set to  0.000000
2/6/2012	4:35:29 PM	H2 MFC set to  500.000000
2/6/2012	4:35:29 PM	BCl3 MFC set to  0.000000
2/6/2012	4:35:29 PM	PH3 MFC set to  0.000000
2/6/2012	4:35:29 PM	SiCl4 MFC set to  0.000000
2/6/2012	4:35:29 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	4:35:30 PM	Tube furnace set to 750
2/6/2012	4:40:30 PM	H2 valve closed
2/6/2012	4:40:30 PM	BCl3 valve closed
2/6/2012	4:40:30 PM	PH3 valve closed
2/6/2012	4:40:30 PM	SiCl4 pre valve closed
2/6/2012	4:40:30 PM	SiCl4 post valve closed
2/6/2012	4:40:30 PM	Main Vac valve closed
2/6/2012	4:40:30 PM	Bypass valve closed
2/6/2012	4:40:30 PM	Helium valve opened
2/6/2012	4:40:30 PM	Bubbler valve opened
2/6/2012	4:40:30 PM	Helium MFC set to  500.000000
2/6/2012	4:40:30 PM	H2 MFC set to  0.000000
2/6/2012	4:40:30 PM	BCl3 MFC set to  0.000000
2/6/2012	4:40:30 PM	PH3 MFC set to  0.000000
2/6/2012	4:40:30 PM	SiCl4 MFC set to  0.000000
2/6/2012	4:40:30 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	4:40:30 PM	Tube furnace set to 0
2/6/2012	5:00:30 PM	Helium valve closed
2/6/2012	5:00:30 PM	H2 valve closed
2/6/2012	5:00:30 PM	BCl3 valve closed
2/6/2012	5:00:30 PM	PH3 valve closed
2/6/2012	5:00:30 PM	SiCl4 pre valve closed
2/6/2012	5:00:30 PM	SiCl4 post valve closed
2/6/2012	5:00:30 PM	Main Vac valve closed
2/6/2012	5:00:30 PM	Bypass valve closed
2/6/2012	5:00:30 PM	Bubbler valve closed
2/6/2012	5:00:30 PM	Helium MFC set to  0.000000
2/6/2012	5:00:30 PM	H2 MFC set to  0.000000
2/6/2012	5:00:30 PM	BCl3 MFC set to  0.000000
2/6/2012	5:00:30 PM	PH3 MFC set to  0.000000
2/6/2012	5:00:30 PM	SiCl4 MFC set to  0.000000
2/6/2012	5:00:30 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	5:00:30 PM	Tube furnace set to 0
2/6/2012	5:00:31 PM	Run finished at 5:00 PM
2/6/2012	6:01:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/6/2012	6:01:16 PM	Recipe started at 6:01 PM
2/6/2012	6:01:16 PM	Helium valve closed
2/6/2012	6:01:16 PM	H2 valve closed
2/6/2012	6:01:16 PM	BCl3 valve closed
2/6/2012	6:01:16 PM	PH3 valve closed
2/6/2012	6:01:16 PM	SiCl4 pre valve closed
2/6/2012	6:01:16 PM	SiCl4 post valve closed
2/6/2012	6:01:16 PM	Main Vac valve closed
2/6/2012	6:01:16 PM	Bypass valve closed
2/6/2012	6:01:16 PM	Bubbler valve closed
2/6/2012	6:01:16 PM	Helium MFC set to  0.000000
2/6/2012	6:01:16 PM	H2 MFC set to  0.000000
2/6/2012	6:01:16 PM	BCl3 MFC set to  0.000000
2/6/2012	6:01:16 PM	PH3 MFC set to  0.000000
2/6/2012	6:01:16 PM	SiCl4 MFC set to  0.000000
2/6/2012	6:01:16 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	6:01:16 PM	Tube furnace set to 0
2/6/2012	6:01:19 PM	H2 valve closed
2/6/2012	6:01:19 PM	BCl3 valve closed
2/6/2012	6:01:19 PM	PH3 valve closed
2/6/2012	6:01:19 PM	SiCl4 pre valve closed
2/6/2012	6:01:19 PM	SiCl4 post valve closed
2/6/2012	6:01:19 PM	Main Vac valve closed
2/6/2012	6:01:19 PM	Bypass valve closed
2/6/2012	6:01:19 PM	Bubbler valve closed
2/6/2012	6:01:19 PM	Helium valve opened
2/6/2012	6:01:19 PM	Helium MFC set to  500.000000
2/6/2012	6:01:19 PM	H2 MFC set to  0.000000
2/6/2012	6:01:19 PM	BCl3 MFC set to  0.000000
2/6/2012	6:01:19 PM	PH3 MFC set to  0.000000
2/6/2012	6:01:19 PM	SiCl4 MFC set to  0.000000
2/6/2012	6:01:19 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	6:01:19 PM	Tube furnace set to 0
2/6/2012	6:01:24 PM	Helium valve closed
2/6/2012	6:01:24 PM	H2 valve closed
2/6/2012	6:01:24 PM	BCl3 valve closed
2/6/2012	6:01:24 PM	PH3 valve closed
2/6/2012	6:01:24 PM	SiCl4 pre valve closed
2/6/2012	6:01:24 PM	SiCl4 post valve closed
2/6/2012	6:01:24 PM	Main Vac valve closed
2/6/2012	6:01:24 PM	Bypass valve closed
2/6/2012	6:01:24 PM	Bubbler valve closed
2/6/2012	6:01:24 PM	Helium MFC set to  0.000000
2/6/2012	6:01:24 PM	H2 MFC set to  0.000000
2/6/2012	6:01:24 PM	BCl3 MFC set to  0.000000
2/6/2012	6:01:24 PM	PH3 MFC set to  0.000000
2/6/2012	6:01:24 PM	SiCl4 MFC set to  0.000000
2/6/2012	6:01:24 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	6:01:25 PM	Tube furnace set to 0
2/6/2012	6:01:26 PM	Run finished at 6:01 PM
2/6/2012	6:01:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/6/2012	6:03:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/6/2012	6:03:45 PM	Recipe started at 6:03 PM
2/6/2012	6:03:45 PM	Helium valve closed
2/6/2012	6:03:45 PM	H2 valve closed
2/6/2012	6:03:45 PM	BCl3 valve closed
2/6/2012	6:03:45 PM	PH3 valve closed
2/6/2012	6:03:45 PM	SiCl4 pre valve closed
2/6/2012	6:03:45 PM	SiCl4 post valve closed
2/6/2012	6:03:45 PM	Main Vac valve closed
2/6/2012	6:03:45 PM	Bubbler valve closed
2/6/2012	6:03:45 PM	Bypass valve opened
2/6/2012	6:03:45 PM	Helium MFC set to  0.000000
2/6/2012	6:03:45 PM	H2 MFC set to  0.000000
2/6/2012	6:03:45 PM	BCl3 MFC set to  0.000000
2/6/2012	6:03:45 PM	PH3 MFC set to  0.000000
2/6/2012	6:03:45 PM	SiCl4 MFC set to  0.000000
2/6/2012	6:03:45 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	6:03:45 PM	Tube furnace set to 0
2/6/2012	6:04:42 PM	Helium valve closed
2/6/2012	6:04:42 PM	H2 valve closed
2/6/2012	6:04:42 PM	BCl3 valve closed
2/6/2012	6:04:42 PM	PH3 valve closed
2/6/2012	6:04:42 PM	SiCl4 pre valve closed
2/6/2012	6:04:42 PM	SiCl4 post valve closed
2/6/2012	6:04:42 PM	Main Vac valve closed
2/6/2012	6:04:42 PM	Bubbler valve closed
2/6/2012	6:04:42 PM	Bypass valve opened
2/6/2012	6:04:42 PM	Helium MFC set to  0.000000
2/6/2012	6:04:42 PM	H2 MFC set to  0.000000
2/6/2012	6:04:42 PM	BCl3 MFC set to  0.000000
2/6/2012	6:04:42 PM	PH3 MFC set to  0.000000
2/6/2012	6:04:42 PM	SiCl4 MFC set to  0.000000
2/6/2012	6:04:42 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	6:04:42 PM	Tube furnace set to 0
2/6/2012	6:05:42 PM	Helium valve closed
2/6/2012	6:05:42 PM	H2 valve closed
2/6/2012	6:05:42 PM	BCl3 valve closed
2/6/2012	6:05:42 PM	PH3 valve closed
2/6/2012	6:05:42 PM	SiCl4 pre valve closed
2/6/2012	6:05:42 PM	SiCl4 post valve closed
2/6/2012	6:05:42 PM	Bypass valve closed
2/6/2012	6:05:42 PM	Bubbler valve closed
2/6/2012	6:05:42 PM	Main Vac valve opened
2/6/2012	6:05:42 PM	Helium MFC set to  0.000000
2/6/2012	6:05:42 PM	H2 MFC set to  0.000000
2/6/2012	6:05:42 PM	BCl3 MFC set to  0.000000
2/6/2012	6:05:42 PM	PH3 MFC set to  0.000000
2/6/2012	6:05:42 PM	SiCl4 MFC set to  0.000000
2/6/2012	6:05:42 PM	Bypass solenoid MFC set to  0.000000
2/6/2012	6:05:42 PM	Tube furnace set to 0
2/6/2012	6:05:43 PM	Run finished at 6:05 PM
2/6/2012	6:05:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
